Top-down fabrication of silicon nanowire using optical lithography

Abstract

A nanowire is a thin wire with a cross section conveniently measured in nanometres (nm). It has a large surface area to volume ration which allows it to have more exposure to the environment. Therefore, it is highly desirable to be implemented as a biosensor as it would exhibit a characteristic of being ultra-sensitive and highly selective to a wide range of biological and chemical species.